基于SMA的微夹持系统实验研究  

Experimental Study on SMA Microgripping System

作　　者：巩娟[1] 李玉和[1] 石志松[1] 李庆祥[1] 

机构地区：[1]清华大学精密仪器与机械系,100084

出　　处：《新技术新工艺》2005年第6期18-20,共3页New Technology & New Process

基　　金：高等学校博士学科点专项科研基金(20020003015)

摘　　要：微夹持技术是微器件装配的关键技术之一。采用柔性铰链机构设计了三自由度微夹持操作平台,并进行了有限元仿真模拟分析;利用形状记忆合金原理进行设计并研制了环状微夹钳,通过形状训练达到了双程形状记忆效应,并建立了微夹持力计算模型;对微夹持系统的运动精度进行了试验分析,结果表明该系统沿X,Y,Z方向的位移分辨率达0.01μm,微夹持钳最大张开量达0.2mm,基本满足了系统性能要求。Microgripping technology is the key technology in assembly of micro systems apparatus. In this paper an incorporate microgripping system is designed based on flexible hinge and SMA, and makes some research experiments. A multi-degree-of-freedom manipulation flatform is designed which is modeled in ANSYS to make the FEM simulation. A micro gripper made of SMA is designed, and it turns into two way SME by shape training. The gripper force model is established. The motion precision of microgripping system is analyzed through experiments. The resolution is 0.01 μm,for displacement in x, y, and z axis, and the maximum displacement of the gripping reaches 0.2 mm. The design basically meets with the requirement of the system.

关 键 词：微夹钳 形状记忆合金 微机电系统 微装配 SMA 

分 类 号：TP241[自动化与计算机技术—检测技术与自动化装置]