低阻TiO_2基三甲胺气体传感器性能分析  

Analysis of performance for low resistance TiO_2-based gas sensor to trimethylamine

作　　者：黄萍[1] 裴素华[1] 孙海波[2] 于连英[1] 李秀琴[1] 

机构地区：[1]山东师范大学物理与电子科学学院,山东济南250014 [2]山东交通学院基础教学部,山东济南250014

出　　处：《传感器技术》2005年第6期7-8,11,共3页Journal of Transducer Technology

摘　　要：按旁热式结构采用以TiO2为基质对InSb2O3Nb2O5氧化物不同的重量比去掺杂研制成的三甲胺(TMA)气体传感器,大幅度降低了加热功率和其在空气中的阻值,器件对响应TMA气体具有灵敏度高、响应时间快、恢复时间短、长期稳定等特点,对干扰气体NH3具有良好的选择性。TMA gas sensor is developed by TiO_2-based and different weight ratio of In-Sb_2O_3-Nb_2O_5 oxides doping with side-heating structure.It can greatly decrease the heating power and resistance in air,with the characteristic of high sensitivity,short response and recovery time,long-term stability for response TMA gas,and with perfect selectivity for the disturbance of NH_3.

关 键 词：气体传感器 敏感元件 响应 灵敏度 三甲胺 

分 类 号：TN304.92[电子电信—物理电子学]