RF-MEMS器件及其关键工艺技术  

RF-MEMS Devices and Its Key Technology

作　　者：陈华君[1] 郭东辉[1] 

机构地区：[1]厦门大学物理与机电工程学院

出　　处：《集美大学学报（自然科学版）》2005年第2期114-120,共7页Journal of Jimei University：Natural Science

基　　金：福建省自然科学基金项目(A0410007)

摘　　要：综合介绍目前无线通讯产品中使用的各种类型RF-MEMS器件,统一说明RF-MEMS器件的基本工作原理,并分析RF-MEMS器件加工的关键工艺技术及设计制作时应注意的问题.As the wireless communication products is now going on the way of low power d issipation, higher frequency and m iniaturization, m icroelectromechanical system (MEMS) technology becomes one of the key technologies to develop the rad io frequency (RF) devices. This paper is to summarize the various types of RF-MEMS devices which had been used in the wireless communication systems, and detail on the main prin- ciple of these RF-MEMS devices. In order to show the keynotes in the design ofRF-MEMS devices, some of importantRF-MEMS processes are also introduced and their shortages are presented.

关 键 词：射频器件 微电子机械系统 RF-MEMS 工艺技术 

分 类 号：TN61[电子电信—电路与系统]