人工欧泊填充InP后的形貌和反射谱特性  

Morphology and Reflectivity Spectrum Properties of InP-infiltrated Opals

作　　者：谭春华[1] 范广涵[1] 许静[2] 龙永福[2] 李述体[1] 周天明[1] 黄琨[1] 雷勇[1] 

机构地区：[1]华南师范大学光电子材料与技术研究所,广州510631 [2]国防科技大学光子晶体研究中心,长沙410073

出　　处：《光子学报》2005年第6期905-908,共4页Acta Photonica Sinica

基　　金：国家973项目预演课题(No.5130702)

摘　　要：制备了人工opal晶体模板,运用MOCVD方法在SiO2人工opal球体间填充了高折射率的InP晶体,选择了MOCVD生长InP的有关参数.样品扫描电子显微镜及反射谱结果检测显示,InP晶体在二氧化硅间隙中的生长是均匀的,具有较好的结晶质量;高介电常数的InP的填充使人工欧泊光子晶体的光子禁带效应增强,反射峰移向长波长区.光学特性检测结果与理论计算值得到较好的符合.Fabricated artificial opal templates, Low pressure metal-organic chemical-vapour deposition has been used to infill the voids within opals and optimized the growth parameters. Scanning electron microscopy images and reflection spectra results show that the InP is very homogeneously distributed inside the opals, with high crystalline quality; the photonic band gap is shifted to higher wavelength as a result of the high contrast of dielectric constants when InP is introduced, which is in agreement with theoretical calculations.

关 键 词：光子晶体 人工欧泊 光子带隙MOCVD 

分 类 号：O437[机械工程—光学工程]