碳纳米管场发射压力传感器结构设计与测试  

Structure Design and Test of Carbon Nanotubes Field Emission Pressure Sensors

作　　者：钱开友[1] 王芸[1] 叶枝灿[1] 颜丙勇[1] 徐东[1] 蔡炳初[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室,上海200030

出　　处：《微细加工技术》2005年第2期69-72,共4页Microfabrication Technology

基　　金：上海市科技发展基金资助项目(0214nm031)

摘　　要：研制出了碳纳米管场发射压力传感器。在结构设计中提出了场发射压力传感器台阶双层阳极变形膜结构,计算机模拟证明,这种结构具有大量程与高灵敏度的优点。同时对这种结构的形变特性进行了实验测试,为传感器结构的整体尺寸设计提供了依据。最后对这种新型传感器的性能进行了测试,表明传感器的灵敏度为0.22μA/kPa(5kPa^101kPa)。A novel field emission pressure sensor has been developed utilizing carbon nanotubes as the electron source. A novel structure of the anode sensing film with the stepped-anode instead of the conventional flat anode is presented in the design of the structure. Computer simulation shows the novel structure has the merits of wide range of measurement and high sensitivity. Simulation and test on the film's deformation characteristics have been also done to provide the design basis for the general size of the sensor's construction. Finally the property of the prototype sensor is measured. The measured result shows that the sensor has a measured sensitivity of about 0.22 μA/kPa(5 kPa^101 kPa).

关 键 词：碳纳米管 场发射 压力传感器 阳极变形膜 计算机模拟 

分 类 号：TP21[自动化与计算机技术—检测技术与自动化装置]