软X射线多层膜透射式起偏器和检偏器设计  

Design of Transmission Multilayer Polarizers and Analyzers in Soft X-Ray Range

作　　者：王占山[1] 顾中祥[1] 王洪昌[1] 陈玲燕[1] 

机构地区：[1]同济大学精密光学工程技术研究所,上海200092

出　　处：《同济大学学报（自然科学版）》2005年第7期859-863,共5页Journal of Tongji University:Natural Science

基　　金：国家自然科学基金资助项目(10435050;60378021);上海市科委纳米专项基金资助项目(0352nm090)

摘　　要：叙述了软X射线波段多层膜透射式起偏器和检偏器的设计原理,提出了设计准则,通过该准则设计的多层膜偏振元件能够同时满足具有较大的光通量和偏振度要求.同时还优化了不同膜厚比情况下软X射线多层膜偏振元件的性能,讨论了在多层膜制作过程中,由于表界面粗糙度和扩散的不同对元件性能的影响,这些工作为制作软X射线多层膜透射式起偏器和检偏器提供了设计基础.In this paper,the principles of designing transmitted multilayer polarizers and analyzers in soft X-ray range were represented and a criterion of choosing the periodic number and periodic thickness of the transmitted multilayer polarizers and analyzers was given,and the designed transmitted multiplayer analyzers by the criteri- on could meet the requirements of having the big throughput and big polarization.At the same time,the perfor- mance of transmitted multilayer analyzers for different ratio of the thicknesses was optimized.And the influence of the optical properties of the transmitted multilayer analyzers by different interfacial roughness and different interfacial diffusion in the process of the multilayer fabrication are discussed.These work can become the design basis of the manufacture of the transmitted multilayer polarizers and analyzers in soft X-ray range.

关 键 词：软X射线 多层膜 透射式起偏器和检偏器 评价函数 偏振率 

分 类 号：O434[机械工程—光学工程] O484.41[理学—光学]