氮化铁梯度薄膜的制备  

PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS

作　　者：姜恩永[1] 刘晖[1] 刘明升[1] 林川[1] 孙多春[1] 

机构地区：[1]天津大学,清华大学

出　　处：《材料研究学报》1995年第1期50-54,共5页Chinese Journal of Materials Research

基　　金：国家自然科学基金

摘　　要：用对向靶溅射仪制备了具有梯度结构的氮化铁薄膜材料．卢瑟福背散射分析结果表明，铁、氮两种原子的密度沿膜厚度方向呈梯度变化．在薄膜中有ζ－Ｆｅ２Ｎ，ε－ＦｅｘＮ（２＜ｘ＜３），γ′－Ｆｅ４Ｎ和α″－Ｆｅ１６Ｎ２等物相．振动样品磁强计测试结果表明部分梯度膜的饱和磁化强度值接近纯铁膜，膜面富铁的梯度样品的矫顽力与基底富铁的梯度样品的矫顽力相差很大。n this paper. the functionally gradient iron nitrides thin films were prepared by facing targets sputtering. Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surface through the whole thickness of the films. The Fe-N gradient films contain the phases of ζ-Fe2N, ε-FexN(2 < x<3).γ′-Fe4N and α″-Fe16N2 etc. VSM results show that the saturation magnetization of some films closes.to the value of the iron films.The coercivity of gradient films which have more Fe atoms near the surface is much higher than that of the gradient films which have more Fe atoms near the substrate.

关 键 词：对向靶溅射 氮化铁薄膜 梯度薄膜 卢瑟福背散射 

分 类 号：TB43[一般工业技术] O484[理学—固体物理]