supported by the National Natural Science Foundation of China(Nos.11405117 and 11205116);International Cooperation Program of the Ministry of Science and Technology of China(No.2015DFR00720)
The ion implantation uniformity is of vital importance for an ion implanter.In this paper,we report the,uniformity measurement for a large current ion implanter(LC-16 type) by implanting of 190-keV Ar ions into Si to ...