压电微马达有限元分析及实验研究  

Fem and Experiment or Piezoelectric Micromotors

作　　者：崔天宏[1] 吴清文[1] 王立鼎[1] 吕琼莹[1] 

机构地区：[1]清华大学精仪系,中国科学院长春光学精密机械研究所

出　　处：《光学精密工程》1995年第6期40-43,共4页Optics and Precision Engineering

摘　　要：压电微马达是微型机械领域中的一个崭新课题，本文从动力学角度对压电微马达进行有限元分析，得出固有频率和定子表面切应力场等重要结论，并通过模型样机实验研究验证有限元分析结论的正确性，从而为压电微马达的优化设计奠定了基础。The piezoelectric micromotor is a new project in the field of Micro Electro Mechanical Systems,In this paper,FFM of the piezoelectric micromotor has been conducted in dynamicsin order to get some important results such as resonance frequencies, shearing force on thestator surface,etc.. The experiment of the piezoelectric micromotor has also been carriedout so that the FEM results of the piezoelectric micromotor has been proved.This has laid asolid foundation for the piezoelectric micromotor optimum design.

关 键 词：微型机械 压电微马达 有限元分析 微电机 

分 类 号：TM38[电气工程—电机]