一种新的外差干涉信号处理方法──相位及相位整数测量法  

A New Signal Processing Method for Heterodyne Interferometer──Measuring Phase and Integer Periodic Phase

作　　者：赵洋[1] 李达成[1] 

机构地区：[1]清华大学精密仪器系

出　　处：《计量学报》1995年第1期31-36,共6页Acta Metrologica Sinica

摘　　要：介绍了一种新的外差干涉信号处理方法──相位及相位整数测量法。用此方法不仅可使干涉测量的分辨率提高到λ／１０００～λ／２０００，而且扩大了测量范围，解决了大范围、动态测量位移的问题。文中还给出了用此方法进行信号处理的外差干涉仪测量压电陶瓷动态位移的实验结果。A new signal processing method for heterodyne interferometer, phase and integer periodic phase measurement, is described. Using this method to process heterodyne signal not only makes the measuring resolution up to λ/1000～λ/2000, but also enlarges the measuring range of the interferometer, with solving the problem of large range and dynamically measuring a displacement. Experiment results are shown with a heterodyne interferometer by using this method to measure the dynamic displacement of a PZT.

关 键 词：外差干涉仪 相位测量 整数相位测量 激光干涉仪 

分 类 号：TH744.307[机械工程—光学工程] TM933.312[机械工程—仪器科学与技术]