晶体管红外热像图的热谱分析方法  

Thermal Spectrum Analysis Method for Infrared Thermogram of Transistors

作　　者：朱阳军[1] 苗庆海[1] 张兴华[1] 卢烁今[1] 

机构地区：[1]山东大学物理与微电子学院,济南250100

出　　处：《Journal of Semiconductors》2005年第7期1364-1368,共5页半导体学报（英文版）

基　　金：国家自然科学基金资助项目(批准号:60476039)~~

摘　　要：使用自编的分析软件,根据比色法对所摄取的晶体管红外热像图进行了热谱分析,给出了晶体管发射区热谱和发射区一维温度分布曲线.一维温度分布曲线给出了整个发射区的结温分布情况,并可直接读取发射区的峰值结温和最低结温,还可以计算出平均结温.晶体管热谱是表示晶体管结温不均匀性的一种与热像图不同的新方法.The infrared thermograms of transistors are investigated according to the colorimetric method. The thermal spectrum curves and one-dimension temperature distribution curves are given from the thermal spectrum analysis. The junction-temperature distribution of the emitter region of the transistors, peak junction temperature,and minimum junction temperature are briefly shown and the average junction temperature is calculated through the one-dimension temperature distribution curves. Transistor thermal spectrum,as a new method,different from the commonly infrared thermogram,is introduced to characterize the non-uniform property of the junction temperature distribution.

关 键 词：晶体管热谱 峰值结温 红外热像图 归一化面积 

分 类 号：TN32[电子电信—物理电子学]