硅基微型直接甲醇燃料电池的研究  

A Silicon-Based Micro Direct Methanol Fuel Cell

作　　者：王晓红[1] 谢克文[1] 姜英琪[1] 钟凌燕[1] 刘理天[1] 

机构地区：[1]清华大学微电子学研究所,北京100084

出　　处：《Journal of Semiconductors》2005年第7期1437-1441,共5页半导体学报（英文版）

基　　金：国家自然科学基金资助项目(批准号:90207023)~~

摘　　要：设计了一种基于MEMS技术的硅基微型直接甲醇燃料电池(DMFC),采用流体力学软件进行了DMFC三维阳极模型的模拟,利用MEMS加工技术和PDMS封装工艺实现了这种燃料电池,并在室温下对有效面积为8600μm×8600μm的电池样品进行了性能测试.测试得到该DMFC的开路输出电压为0.5V,短路工作电流密度达到78.1mA/cm2,最大输出功率密度为3.86mW/cm2.主要参数已达到了一些电子器件的要求,具有一定的实用价值.A silicon-based micro direct methanol fuel cell （DMFC） with an 8600μm×8600μm active area is designed. The simulation of a 3D anode model for the liquid-feed micro DMFC based on fluid dynamic technologies is presented. Two bipolar plates with flow fields are fabricated on silicon wafers using MEMS technology. The cell is assembled by sandwiching the MEA between two bipolar plates using PDMS. The testing results show that the open circuit voltage is 0. 5V and the maximum output power density is 3.86mW/cmz when 1M methanol is fed at room temperature. This power density can satisfy the requirements of power consumption of many electronic devices.

关 键 词：硅基微型燃料电池 直接甲醇燃料电池 PDMS MEMS 

分 类 号：TM912[电气工程—电力电子与电力传动]