一种新型微机械红外热探测器的吸收层  

New Absorbing Layer for Infrared Thermal Detector of Micromachine

作　　者：梁晋涛[1] 刘君华[1] 张进永[1] 

机构地区：[1]西安交通大学电气工程学院,西安710049

出　　处：《西安交通大学学报》2005年第8期856-858,894,共4页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目(60276037).

摘　　要：在对新型微机械悬臂梁红外热探测器进行理论建模的基础上,研究了一种适合于此种红外热探测器的吸热层材料——碳纳米管.利用碳纳米管的红外吸收特性,在微机械悬臂梁上生长碳纳米管薄膜作为吸热层,提高了微机械悬臂梁红外探测器的红外吸收能力.研究结果表明,选用碳纳米管薄膜作为微机械悬臂梁红外热探测器的吸热层比选用传统的红外吸收层材料探测分辨率提高了10%,这种基于微电子机械系统技术的传感器与集成电路工艺是兼容的,成本低廉且适合批量生产.Based on the theoretical model of new infrared（IR） thermal detector of micro-mechanical cantilever, a new infrared absorbing layer- carbon nanometer tube is investigated, where the tube is adopted to enhance efficiently the infrared absorbing characteristic. The results show that carbon nanometer tube, as the absorbing layer of a micro-mechanical cantilever, outperforms the traditional IR absorbing layers, and the power resolution is increased by 10%. Furthermore, the micro-electro-mechanical system sensor is compatible with integrated circuit technology and suitable to batch production with a lower cost

关 键 词：红外热探测器 微机械 碳纳米管 

分 类 号：TN202[电子电信—物理电子学]