一种微开关悬臂梁的静力变形分析模型及其应用  

STATIC MODEL FOR ANALYZING A MICRO-MACHINED SWITCH CONSISTING OF A CANTILEVER BEAM AND ITS APPLICATION

作　　者：丁芳[1] 曹天捷[1] 

机构地区：[1]中国民用航空学院交通工程分院,天津300300

出　　处：《机械强度》2005年第4期460-464,共5页Journal of Mechanical Strength

摘　　要：建立一种微开关悬臂梁的静力变形分析模型,该模型将微开关悬臂梁的受力变形分为三个阶段,受电场力作用的悬臂梁阶段,受电场力作用的一端固支、另一端铰支的单跨梁阶段以及受电场力和集中力联合作用而保持自由端有指定的位移和零转角阶段。第二阶段中铰支端支反力的大小以及第三阶段中集中力的大小和作用位置均与电场力的驱动电压有关;同时文中将求解微开关悬臂梁挠度的高阶微分方程问题转化为含有未知初始条件的一阶微分方程组问题。在实例中,设计一种求解未知初始条件的迭代方法,并给出部分计算结果,从中可得出一些有益的结论。A static model for analyzing a micro-machined switch consisting of a cantilever beam is presented. This model divides the deformation of the cantilever beam subjected to the electrostatic force into three stages： the first is a cantilever beam subjected to the electrostatic actuator; the second is a beam built in at one end and simply supported at the other; the third is a beam subjected to both the electrostatic actuator and a concentrated force with a given displacement and a zero angle of rotation at its free end. The reaction force at the simply supported end at the second stage and the concentrated force and its position at the third stage are related with the actuating voltage. In addition, the differential deflection equation of the cantilever beam with order four is changed into the four differential equations with order one and with partial unknown initial conditions. In the example, a method to solve for the unknown initial conditions and the actuating voltage is presented and some results are given, from which some beneficial conclusions can be obtained.

关 键 词：微开关 悬臂梁 电场力 微分方程 

分 类 号：TN454[电子电信—微电子学与固体电子学]