硅基PZT压电驱动微开关的设计和优化  

Design and Optimization of Micro-switch Actuated by PZT Piezoelectric Cantilever Based on Si

作　　者：娄利飞[1] 杨银堂[1] 李跃进[1] 张军琴[1] 

机构地区：[1]西安电子科技大学微电子研究所宽禁带半导体材料与器件教育部重点实验室,陕西西安710071

出　　处：《压电与声光》2005年第4期445-448,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(90207022)

摘　　要：采用压电多层微悬臂梁理论分析模型,研究了一种新型PZT压电复合多层膜微悬臂梁驱动微开关的机械性能,提出了一种新的硅基PZT压电复合多层薄膜微悬臂梁驱动微开关的制作方法。利用有限元分析软件AN SY S7.0对微悬臂梁结构进行了模态分析,探讨了结构参数与微悬臂梁运动特性的关系及影响压电薄膜微开关性能的因素,进一步模拟了0.3 V工作电压下微开关的位移。结果表明,经优化后的压电薄膜微开关可进一步应用到集成化芯片系统中。The mechanical performance of a novel micro-switch actuated by PZT piezoelectric multiple-layer cantilever is studied with piezoelectric multiple-layer cantilever analysis model, and a new fabrication process of th emicro-switch actuated by PZT piezoelectric multiple-layer cantilever based on $i is presented. By using software of finite element ANSYS7.0, the analyses on modal shapes of micro-cantilever structure are carried out. The relationship between structure parameters and the movement performance and some factors that may have an effect on the performance of this micro-switch are discussed. Furthermore the displacement of micro-switch applied directcurrent working voltage of 0.3 volts is simulated. The results demonstrate that the micro-switch optimized can be applied to system on chip.

关 键 词：压电薄膜 有限元分析 微开关 

分 类 号：TN304.055[电子电信—物理电子学]