阴极溅射对35CrMo钢离子硫氮碳共渗层的影响  

Effect of Cathode Sputtering on Ion Sulfo-carbonitrided Case of 35CrMo Steel

作　　者：李正林[1] 王庆祝[1] 马涛[1] 

机构地区：[1]西安公路学院,西安710064

出　　处：《金属热处理》1995年第3期6-8,共3页Heat Treatment of Metals

摘　　要：用氩离子对35CrMo钢离子硫氮碳共渗层进行了阴极溅射。通过金相观察，显微硬度测定，X射线衍射相结构分析，电子探针氮碳硫分布，分析了阴极溅射对离子硫氮碳共渗层的影响。结果表明，阴极溅射使共渗层中ε相和γ′相减少，白亮层呈典型粒状晶形貌，沿渗层深度氮碳的分布变化，峰值下降，次表层氮碳含量增加。离子硫氮碳共渗与阳极溅射良好的匹配，可使共渗硬化效果显著，渗层厚度增加。Ion sulfo-carbonitriding on 35CrMo steel was carried out by Argon ion cathode sputtering and was an-alyzed by means of metalloscopy, micro-hardness test, X-ray diffraction phase analysis, electron microprobe de-tection for N,C,S distribution in the case. The results show that when cathode sputtering is used (a)ε-phaseand γ-phase are decreased, (b) white layer is appeared with morphology of columnar crystal, (c) distribution ofN,C in the case are increased in sub-surface and (d) peak values decreased. A good matching of ion sulfo-car-bonitriding process with cathode sputtering could improve hardening effect significantIy and increase the casethickness.

关 键 词：碳氮共渗 铬钼钢 阴极溅射 离子硫 

分 类 号：TG161.82[金属学及工艺—热处理]