高分辨率光学轮廓仪  

High Resolution Optixal Profiler

作　　者：高宏[1] 李庆祥[1] 薛实福[1] 顾晓渝[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《仪器仪表学报》1995年第2期135-139,共5页Chinese Journal of Scientific Instrument

摘　　要：本文提出了一种对机械振动等环境干扰不敏感的高分辨率光学轮廓仪，应用Ｎｏｍａ－ｒｓｋｉ微分干涉显微成象原理和相移干涉技术，实现了对表面微观轮廓的高精度绝对测量。仪器不需要标准参考反射镜和机械扫描机构，并且对机械振动等外界干扰不敏感，在不采取隔振和恒温等环境控制措施的一般实验室环境中，达到了优于０．１ｎｍ的垂直分辨率和０．２ｎｍ的表面轮廓高度重复测量精度。Abstract An interferometric optical profiler with 0.1nm height resolution is de-scribed in this paper.The instrument using Nomarski differential interference microscopy isinsensitive to mechanical vibration and no reference surface is needed. The profiler consistsof a differential interference microscope with a polarization phase shifter.CCD detector ar-ray.a video frame grabberm.and a computer.High precision absolute tneasurement of sur-face profiles was achieved by using the PSI(Phase Shifting Interferometry ). The instrumenthas measured surface profiles with a vertical resolution better than 0.1nm and a repeatabilityof 0.2nm in an ordinery laboratory environment without vibration isolation and constanttemperature.

关 键 词：高分辨率 光学轮廓仪 测量 

分 类 号：TH74[机械工程—光学工程]