离子束溅射制备Co/Pt多层膜的结构和磁性  

STRUCTURE AND MAGNETISM OF THIN Co/Pt MULTILAYERED FILMS SYNTHESIZED BY ION BEAM SPUTTERING

作　　者：许思勇[1] 赵怀志[1] 冯嘉猷[2] 李文治[2] 

机构地区：[1]昆明贵金属研究所,昆明650221 [2]清华大学材料科学与工程系,北京100084

出　　处：《真空科学与技术》1995年第2期92-96,共5页Vacuum Science and Technology

摘　　要：采用离子束溅射技术制备了Co／Pt多层膜，并研究了多层膜的结构和磁性随Co层厚度（tCo）或Pt层厚度（tPt）的变化关系。结果表明Co层呈现出hcp结构的（002）织构，Pt层表现出fcc结构的（111）织构。当Co层和Pt层都比较薄时，界面有Co-Pt的化合物形成。当tPt=2．4nm而tCo在0．6～2．4nm变化时，样品的磁矫顽力（Hc）随tCo增加而下降，饱和磁化强度（Ms）随tCo增加而增加。当tCo=1．2nm而tPt在1．2～4．8nm变化时，Hc呈现先升后降的变化，Ms随tPt增大而减小。样品的Hc还受调制周期（D）和周期数ny的影响，通过对Co层和Pt层的厚度比、调制周期、周期数的设计，可以获得较大的磁矫顽力。Thin Co/Pt multilayered films have been prepared by means of ion beam sputtering. The dipendence of structure and magnetic properties on the thickness of Co layer (tCo),Pt layer (tPt) have been investigated. The structures of the samples were mainly hcp structure with (002) texture for Co layer and fcc structure with (111) texture for Pt layer. If the thickness of one composite (Co or Pt) becomes thin enough,the Co-Pt compounds will form at the interfaces. When tPt was fixed at 2. 4nm and tCo was varied from 0. 6 to 2.4 nm, the coercivity decreased with the increasing of tCo, but the saturation magnetization increased with the increasing of tCo. When tCo was fixed at 1. 2nm and tPt was varied from 1. 2 to 4. 8nm, the saturation magnetization decreased with the increasing of tPt. The dependence of the coercivity on tPt had a tendency of that increased first and decreased afterwards. However, the coercivity depends on the modulation periodicity of the thin Co/Pt multilayered films, and the number of bilayers. A large coercivity has been obtained by designing the ratio of the Co-to-Pt layer thickness, the modulation periodicity, and the number of bilayers.

关 键 词：离子束溅射 钴/铂多层膜 磁矫顽力 结构 磁性 

分 类 号：TN405.985[电子电信—微电子学与固体电子学] TN304.055