超紧凑型SOI基3×3 MMI波导光开关的优化设计  

Optimal Design of Ultra-compact 3×3 SOI MMI Optical Switch

作　　者：贾晓玲[1] 高凡[2] 张峰[2] 

机构地区：[1]同济大学电子科学与技术系,上海200092 [2]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《半导体光电》2005年第4期294-298,共5页Semiconductor Optoelectronics

摘　　要：提出一种基于SOI材料的超紧凑型3×3 MMI波导光开关,开关仅有一个多模波导,且多模波导采用更为紧凑的双曲结构。用FD-BPM方法对其各个状态进行了模拟和分析,并对器件的结构参数进行了优化设计。结果表明,这种光开关可以成功实现任意两输入和输出通道间的开关功能,优化后的开关呈现优良的综合性能,且整个器件的尺寸小于4 mm。Ultra-compact 3 ～ 3 SOI multimode interference （MMI） optical switches were presented. There is only one hyperbolic multimode waveguide in the switch. The various states of the switches were simulated and analyzed using the finite difference beam propagation method （FD-BPM） ,the structure parameters of the switch were also designed and optimized. The results show that the switch can realize on-and off-function between any pair of input and output channels. The optimized switch has excellent properties, and the whole size of the switch is less than 4 mm.

关 键 词：多模干涉耦合器 光开关 SOI 区域调制 双曲结构 

分 类 号：TN256[电子电信—物理电子学]