纵向驱动MEMS永磁双稳态机构  

Perpendicular Drived MEMS Permanent Magnet Bistable Structure

作　　者：姜政[1] 丁桂甫[1] 王艳[1] 顾东华[1] 王志明[1] 冯建智[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,上海200030

出　　处：《纳米科技》2005年第4期25-30,共6页

基　　金：教育部科学技术研究重大项目资助（0307）;电科院预研（41308050116）

摘　　要：在MEMS继电器中引入双稳态机构可以有效地减少功耗。在进行理论分析证实可行性和模拟仿真优化参数后，利用非硅表面微加工方法中的牺牲层工艺制备了一种扭梁悬臂梁支撑的扭摆式MEMS永磁双稳态机构。该双稳态结构尺寸为1．9mm×1．6mm×0．03mm，通过永磁力实现无功耗姿态保持，对其单侧触点施加纵向驱动力达到15μm的纵向驱动位移可以实现双稳态姿态的切换，控制永磁体磁片、悬臂梁和扭梁的尺寸来灵活调控稳态切换所需的驱动力矩。此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。Introducing bistable structure into MEMS relay can remarkably reduce the power consuming. After feasibility analyzing and parameter optimizing, a teeterboard pattern MEMS permanent magnet bistable structure supported by torsion and cantilever beam was fabricated by sacrificial layer technology of non-silicon surface micro fabrication. The size of the bistable structure is 1.9mm×1.6mm×0. 03mm. The stable states can be kept without power consuming by permanent magnet force, and the two states are switched by adding perpendicular driving force at one side of the anchors to achieve 15μm perpendicular displacement. The driving moment can be adjusted by controlling the sizes of permanent magnet, torsion and cantilever beam. With electromagnet, electrothermal and electrostatic micro actuators, this bistable structure can be applied into permanent magnet bistable MEMS relay.

关 键 词：永磁 双稳态 MEMS 微继电器 

分 类 号：TN603.5[电子电信—电路与系统]