金刚石膜生长过程原位光发射谱研究  

Investigation of Diamond Growth Process by in situ Optical Emission

作　　者：崔景彪[1] 方容川 

机构地区：[1]中国科技大学物理系,合肥230026 [2]中国科技大学结构分析开放实验室,合肥230026

出　　处：《物理化学学报》1996年第2期102-104,共3页Acta Physico-Chimica Sinica

基　　金：国家863高技术发展计划资助

摘　　要：In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.

关 键 词：光发射谱 CVD 金刚石膜 

分 类 号：O613.71[理学—无机化学] O484.1[理学—化学]