脉冲激光对类金刚石(DLC)薄膜的热冲击效应研究  

Thermal shock effect on diamond-like carbon thin films induced by pulsed-laser

作　　者：牛燕雄[1,2,3] 黄峰[1,3] 段晓峰[1,3] 汪岳峰[1,3] 张鹏[1,3] 何琛娟 禹晔[1,3] 姚建铨[2] 

机构地区：[1]解放军军械工程学院光学与电子工程系,石家庄050003 [2]天津大学精密机械与光电子工程学院,光电信息技术科学教育部重点实验室,北京100080 [3]中国科学院物理研究所光物理实验室,天津300072

出　　处：《物理学报》2005年第10期4816-4821,共6页Acta Physica Sinica

摘　　要：强激光辐照红外热像系统时,可造成系统的干扰和破坏,激光的波长不同,对系统的破坏效果也不同.为了保护红外系统窗口以及提高窗口的透过率,红外窗口广泛沉淀类金刚石(DLC)薄膜.当入射的激光波长位于红外系统响应波段外时,激光对系统的破坏首先是激光对DLC薄膜的破坏.以波长为1·06μm的激光为例,研究了脉冲激光对DLC薄膜的损伤机理,建立了DLC薄膜的热冲击效应模型,并通过求解热传导和应力平衡方程,得出了薄膜的温度场和应力场分布.理论分析表明,热应力破坏在脉冲强激光对DLC膜的损伤机理中占主导地位.当辐照能量密度为E0=100mJ·cm-2时,在薄膜表面距光斑中心约40μm区域内的压应力明显超出其断裂强度,将造成膜层的剥离、脱落.理论分析与实验结果基本相符,表明建立热冲击效应模型的正确性.When high power laser irradiates the infrared imaging system, the system will be injured or destroyed. The damage to the systems varies for different laser wavelengths. The infrared windows are generally coated with diamond-like carbon（DLC） thin films to protect itself and improve the permeation rate. When the incident laser＇ s wavelength lies outside the infrared system response wave band, laser destroys the DLC films firstly. The DLC films＇ damage mechanism induced by pulsed laser is studied with the 1.06μm laser. The thermal shock effect model of DLC films is proposed. The temperature and stress distributions are deduced through solving the thermal conduction equation and stress-balance equation. The theoretical analysis shows that thermal stress fracture dominants in the damage mechanism. When the irradiation energy density is E0 = 100mJ·cm^-2, the pressure on the surface of DLC films at about 40μm from the center of laser facula exceeds the rupture intensity, the film will break and peel off. The theoretical analysis matches the experimental results basically, and the correctness of the thermal shock effect model is confirmed.

关 键 词：激光辐照 类金刚石(DLC)薄膜 热冲击效应 DLC薄膜 脉冲激光 类金刚石 热冲击 效应研究 红外热像系统 激光波长 

分 类 号：O484[理学—固体物理] TN241[理学—物理]