表征ULSI低介电常数互连材料机械特性的表面波频散特性  

Dispersive Characteristics of Surface Acoustic Waves for Measuring Mechanical Properties of Low-k Dielectrics Used in ULSI

作　　者：李志国[1] 肖夏[1] 张鑫慧[1] 姚素英[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《Journal of Semiconductors》2005年第10期2032-2037,共6页半导体学报（英文版）

基　　金：国家自然科学基金(批准号:60406003);教育部留学回国人员科研启动基金资助项目~~

摘　　要：研究了在Si(100)衬底上淀积低k薄膜的分层结构中表面波沿Si[100]和[110]晶向传播的速度频率色散特性,给出了表面波色散特性的理论推导,得到了低k薄膜的杨氏模量、密度、厚度和泊松常数对色散关系的影响.The dispersive characteristics of SAW propagating along both the Si[-100] and [-110] directions on the layered structure,with the low-k thin film deposited on the silicon （100） substrate, were studied in detail. The theoretical equations to obtain dispersion curves of SAW were derived. The effects of the Young＇ modulus, density, thickness, and Poisson＇s ratio of the low-k films on the dispersive characteristics were found.

关 键 词：低介电常数介质 表面波 频散特性 杨氏模量 

分 类 号：TN405.97[电子电信—微电子学与固体电子学]