电控可调光衰减器性能及分析  

Design of micro-machining based digital variable optical attenuator

作　　者：曹钟慧[1] 吴兴坤[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室光及电磁波研究中心,浙江杭州310027

出　　处：《浙江大学学报（工学版）》2005年第10期1553-1556,1570,共5页Journal of Zhejiang University：Engineering Science

摘　　要：为了实现数字化电控调节光衰减量,提出一种电磁线圈驱动的微光机电系统(MOEMS)可调光衰减器,该衰减器主要通过电磁力步进驱动微加工齿轮/齿条机构,带动偏心轮,从而移动挡光片调节光衰减量,实现单模光纤中光传输功率的数字化电控调节.器件采用非硅基底MOEMS技术制作,并具有断电自锁功能.主要对该器件的损耗,光功率衰减量作了理论计算,并进行器件性能测试,测得主要技术指标原始插入损耗< 0.3 dB,波长相关损耗< 0.2 dB,衰减范围0～40 dB,回波损耗> 50 dB.A design of micro-machining based digital micro-optical-electro-mechanical systems （MOEMS） variable optical attenuator was reported for digitally adjusting optical attenuation. The device is generated by introducing a movable shutter in the path of the optical beam by stepwise movement controlled by an eccentric wheel driven by a pair of electromagnetic displacement actuators and is fabricated using non-silicon micro-machining technology. The characteristics of the device were analyzed by scalar wave theory based numerical simulation. Compared with calculated result, the performance of the digital variable optical attenuator （DVOA） has lower insertion loss （〈0. 3 dB）, wavelength dependent loss （〈0.2 dB）, return loss （〉50 dB）, and wider dynamic response （0-40 dB）.

关 键 词：微光机电系统 可调光衰减器 光通信 微位移驱动器 

分 类 号：TN253[电子电信—物理电子学]