硅微机械振动陀螺的静电驱动  

Electrostatic Drive Technology of Silicon Micromechanical Vibrating Gyroscope

作　　者：茅盘松[1] 王修伦[1] 

机构地区：[1]东南大学

出　　处：《传感器技术》1996年第1期11-13,共3页Journal of Transducer Technology

摘　　要：详细分析了双框架结构的硅微机械振动陀螺的驱动技术。结果说明：为了获得陀螺的最佳灵敏度，陀螺外框架上外加驱动电压的人小和频率的选择受到陀螺内外框架固有频率的约束。The electrostatic drive technology of silicon micromechanical vibratingg gyroscope with inner and outer frames is studied. The anayse illustrated that the range and frequency of drive voltage in outer frame are bound the resonant frequencies of its inner and outer frames in order to get opeimum gyroscope transducer sensitivity.

关 键 词：硅 振动陀螺 驱动技术 灵敏度 

分 类 号：TN304.12[电子电信—物理电子学] TN305