毛细力驱动自组装定位模型  

Model of self-assembly positioning using capillary forces

作　　者：赵旦谱[1] 吴丹[1] 陈恳[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2005年第11期1480-1483,共4页Journal of Tsinghua University(Science and Technology)

摘　　要：毛细力驱动自组装的定位是利用微元件及基片表面之间的毛细力作用实现的。为了研究微元件及组装区的形状对自组装定位的影响,在分析毛细力驱动自组装机理的基础上,利用能量法建立了毛细力驱动自组装系统的定位解析模型,预测了不同形状微元件的自组装结果,并对一些不合理的组装设计进行了修正。结果表明:通过计算自组装表面能量可以预测组装结果,并设计合理的粘合区形状。The capillary forces between micro-parts and the binding site are essential for self-assembly positioning using capillary forces. The effects of different shapes of micro-parts and binding sizes on the self-assembly positioning were investigated based on an analysis of the self-assembly mechanism using capillary forces with an energy-based method. The model was then used to predict self-assembly for various shapes of micro-parts and to modify some illogical assemblies. The results indicate that the model can predict the self-assembly outcome by calculating the self-assembly surface energy for a given design and can be used to design the binding site for a given set of micro-parts.

关 键 词：自组装 微加工 毛细力 定位 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]