利用光学薄膜模型研究垂直腔面发射激光器的光学特性  

Study of the optical characteristic of the vertical surface emitting laser using optical thin-film model

作　　者：盖红星[1] 郭霞[1] 邓军[1] 李建军[1] 韩军[1] 邢艳辉[1] 俞波[1] 牛南辉[1] 陈建新[1] 沈光地[1] 

机构地区：[1]北京工业大学光电子技术试验室,北京100022

出　　处：《光学技术》2005年第6期904-906,909,共4页Optical Technique

基　　金：国家973计划资助项目(TG2000068302);国家自然科学基金资助项目(60276033);北京市教委资助项目(01kJ_014)

摘　　要：可以把垂直腔面发射激光器看作是多层光学薄膜,应用光学薄膜原理对其光学薄膜的特性进行了研究。计算分析了布拉格反射镜和谐振腔模的反射谱受器件结构变化的影响。通过利用菲涅耳系数矩阵法计算,得到了光在垂直腔面发射激光器器件结构中形成的驻波场分布。结果表明,利用菲涅耳系数矩阵法设计垂直腔面发射激光器的光学薄膜是一种快捷准确的方法。The vertieal-eavity surface-emitting laser （VCSEL） is treated as multilayer optical thin-film composed of a stack of semiconductor materials, and its optical properties can be designed using the optical thin-film theory. The influence of the device structure on the distributed Bragg reflector （DBR） reflectivity and the cavity mode reflectivity is calculated and analyzed. Further, the standing wave distribution in the entire device was calculated using the Fresnel matrix method of optical thin film. From the results of calculation, it shows that studying and design the vertical-cavity surface-emitting lasers optical properties as the optical thin-film is a simple way.

关 键 词：垂直腔面发射激光器 光学薄膜 反射谱 驻波场 半导体激光器 

分 类 号：O484[理学—固体物理] TN248[理学—物理]