新型金刚石膜微条气体室X射线探测器  

Properties of novel MSGC of diamond film for X-ray

作　　者：苏青峰[1] 夏义本[1] 王林军[1] 杨莹[1] 张明龙[1] 楼燕燕[1] 顾蓓蓓[1] 崔江涛[1] 史伟民[1] 

机构地区：[1]上海大学材料科学与工程学院电子信息材料系,上海200072

出　　处：《核电子学与探测技术》2005年第6期750-753,共4页Nuclear Electronics & Detection Technology

基　　金：国家自然科学基金(批准号60277024)上海市科委启明星项目(批准号02QE14018)上海应用材料研究与发展基金(批准号0307)资助上海市教育委员会"材料学"重点学科赞助

摘　　要：以金刚石膜/硅复合材料作为基板,运用微加工技术在金刚石膜/硅衬底上光刻铬/金微条电极,制成了流气式微条气体室探测器。在室温及101.0kPa下,使用微机多道能谱仪及辅助电子学设备在5.9keV55FeX射线辐照下测量了微条气体室探测器在不同电压下的能谱响应和脉冲信号。结果表明微条气体室探测器具有较高的信噪比,计数率≥103Hz,当混合工作气体Ar:CH4=90:10、漂移电压-1000V、阴极电压-650V、阳极0V时,能量分辨率达12.3%。MSGC was prepared on diamond film/silicon composite substrate using Cr/Au as electrodes materials. Micro-strip electrodes were photo-etched by modern microelectronic technology. Energy resolution and pulse signal of 5.9keV ^55Fe X-ray using Ar＋CH4 mixture as working gas under room temperature 101.0kPa with different voltage were measured by a Multi-channel energy spectrometer. Resuits indicated that high signal-noise ratio, counting rate （10^3Hz of the MSGC were obtained. When Ar ： CH4 = 90 ： 10, drift voltage, cathode voltage and anode voltage was--1000V, --650V and 0V, respectively, the energy resolution reached 12.3%.

关 键 词：金刚石膜 MSGC X射线探测器 能量分辨率 

分 类 号：TL816.1[核科学技术—核技术及应用] TN304.18[电子电信—物理电子学]