电子束直写技术制作GHz频带声表面波器件  

Electron Beam Direct Writing Technology Applied for Fabrication of GHz Frequencies SAW Devices

作　　者：杨忠山[1] 范子坤 田丰[1] 韩立[1] 

机构地区：[1]中国科学院电工研究所,北京100080 [2]北京长峰声表面公司,北京100854

出　　处：《压电与声光》2005年第6期606-609,共4页Piezoelectrics & Acoustooptics

摘　　要：电子束具有刻写微细图形尺寸的能力,容易实现亚微米宽格栅的声表面波器件制造,因此可达到器件的高频化和在设计上更具灵活性。该文介绍了器件图形的数据处理策略,基片的制备和工艺过程。描述了在电子束曝光过程中采取的一些独特方法,生产了性能良好的吉赫兹频带滤波器、谐振器和延迟线等声表面波器件。We have experienced fabrixation of surface acoustic waves （SAW）by using electron beam lithography tool directly. Since electron beam have capability of writing fine size of pattern SAW devices with submicron line/space gratings can be realized easily. Therefore the devices can reach high frequencies and have more flexibility in design. This paper introduced data processing strategies of pattern of the dveicse, substrate preparation and technique processes. Especially, some unique technologies are described during the electron beam exposure processing. Some GHz frequencies SAW devices with good qualities,such as filters, resonators and retarders have been produced.

关 键 词：半导体工艺 声表波器件 电子束刻蚀技术 

分 类 号：TN65[电子电信—电路与系统]