用于同步辐射单色器多层膜的研究  

Research on multilayer films used in synchrotron radiation monochromator

作　　者：张众[1] 王占山[1] 吴文娟[1] 王洪昌[1] 王风丽[1] 顾春时[1] 秦树基[1] 陈玲燕[1] 华巍[2] 黄宇营[2] 

机构地区：[1]同济大学精密光学工程技术研究所,上海200092 [2]中国科学院高能物理研究所同步辐射实验室,北京100049

出　　处：《核技术》2005年第12期900-903,共4页Nuclear Techniques

基　　金：上海市科委纳米专项基金资助;项目编号:0352nm090

摘　　要：结合Fensnel反射系数公式与Nevot-Croce模型,设计出了可以用于同步辐射单色器的W/B4C周期多层膜,并对其光学性能(反射率)做了模拟计算。采用高真空磁控溅射技术,实现不同周期的W/B4C周期多层膜的制备。利用英国BEDE公司出产的D1高分辨X射线衍射仪,完成W/B4C周期多层膜周期结构的测量。在北京同步辐射荧光束线(4W1B)上,利用W/B4C多层膜获取准单色光,实现材料的荧光分析实验。实验结果证明,W/B4C多层膜对同步辐射白光起到了单色的作用,可以得到高强度的准单色同步辐射X射线。In this paper, the W/B4C periodic multilayer films are designed, and their optical characters （reflectivity） are calculated based on the Fresnel formula connected with the Nevot-Croce model. The W/BaC X-ray periodic multilayer films with small period （d=4.2nm） are fabricated by the high vacuum magnetron sputtering technology, and its structure was measured by D1 XRD from BEDE Company, UK. On the Beijing Synchrotron Radiation X-ray Fluorescence Analysis Spectroscopy （XFAS） beam line, the W/BaC multilayer film was used as the monochromator instead of the crystal for the XFAS experiment. The experiment results demonstrated that the quasi-monochromatic X-ray beam can be obtained by using such period multilayer film. The EFAS experiment of standard sample Nist_612 proves that the tiny content element （about 50 μg/g） can be probed by the new XFAS optical setup based on W/B4C periodic multilayer film.

关 键 词：多层膜 单色器 同步辐射 X射线荧光分析 

分 类 号：O434[机械工程—光学工程] O484.1[理学—光学]