纳米级XY微定位平台的设计与研究  

Development and Investigation of a XY Micropositioning Table

作　　者：田延岭[1] 张大卫[1] 闫兵[2] 

机构地区：[1]天津大学机械工程学院,天津300072 [2]天津工程师范学院机械工程系,天津300222

出　　处：《组合机床与自动化加工技术》2005年第12期83-85,88,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金(50275104);天津市自然科学基金项目(013605311)

摘　　要：为了实现二维平面纳米级定位,研制了一台压电陶瓷驱动和弹性铰链导向的一体化微定位平台。该微定位平台具有高刚度、高响应速度和高分辨率等优点。为了克服压电陶瓷驱动器伸长量较小的不足,采用杠杆放大机构增加微定位平台的位移输出。考虑驱动电路的影响,建立了微定位平台的机电耦合模型。通过试验研究了微定位平台的静动态特性,试验结果表明微定位平台的分辨率为5nm,固有频率分别为143Hz和180Hz。该微定位平台可应用于纳米级的微定位。In order to realize 2-dimensional nanometer level positioning, this paper presents a piezoelectrically driven micmpositioning table with high stiffness and resolution. A flexure hinge mechanism is utilized to guide the moving part and to provide preload for the piezoelectric actuators. The lever amplifiers are used to enlarge the working range of the moving platform. The dynamic model of the micropositioning table has been established with consideration of the driving circuit. A series of experimental testing is carried out to verify the performance of the micropositioning table. From the experimental data, it is noted that the piezoelectrically driven micro-positioning table has a resolution of 5 nm and natural frequencies up to 143 Hz and 180 Hz respectively. Which indicates that the table is useful for nanometer level positioning applications.

关 键 词：微定位平台 压电陶瓷驱动器 动态性能 

分 类 号：TG502.3[金属学及工艺—金属切削加工及机床]