基于数字调谐方法的微悬臂梁品质因数的研究  

Quality Factor of Microcantilever Based on Digital Tuning Method

作　　者：朱龙洋[1] 鲁健[1] 吴亚雷[1] 许晓慧[1] 褚家如[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230027

出　　处：《纳米技术与精密工程》2005年第4期273-277,共5页Nanotechnology and Precision Engineering

基　　金：教育部博士点基金资助项目(20030358018)优秀青年教师资助计划项目.

摘　　要：品质因数(Q值)是影响微悬臂梁设备灵敏度的关键因素．针对微悬臂梁在空气中品质因数低的问题,利用基于DSP的数字锁相技术,通过一种正反馈方法,对微悬臂梁的振动能量损耗进行补偿,将微悬臂梁的品质因数从181提高至871．实验表明,使用数字正反馈电路后,微悬臂梁振幅随其工作频率的变化表现出了更高的灵敏度, 从而能有效提高微悬臂梁用于微小形变检测时的检测灵敏度．The sensitivity of devices based on microcantilever depends critically on the quality factor（Q）. In order to enhance the quality factor of the microcantilever, a digital positive feedback loop was applied to the ferroelectric thin films Test System. The quality factor was enhanced from 181 to 871. The result shows that the sensitivity of the amplitude to the resonant frequency changes was enhanced, which could satisfy the requirement of detection of nanometer-scale deformation.

关 键 词：品质因数 微悬臂梁 数字调谐 数字锁相 

分 类 号：TH703[机械工程—仪器科学与技术]