微机械面型微加热器的热学分析  

Thermal analysis of MEMS micro-hotplate with uniform temperature in large area

作　　者：吴雷[1] 李铁[1] 王立春[1] 王翊[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050

出　　处：《功能材料与器件学报》2005年第4期466-470,475,共6页Journal of Functional Materials and Devices

摘　　要：针对微机械面型微加热器,采用解析方法对加热器在真空和大气下的温度分布,以及均热器对加热器温度分布的影响进行了深入分析。分析结果表明,真空下环形加热电阻可以达到较好的大面积均温效果,而大气下的加热电阻应尽可能小同时尽可能分布在整个加热区内,分析的结果经ANSYS有限元模拟和样品制作测试,与实际情况吻合较好。Thermal performance of MEMS based micro - hotplate was investigated by a simplified model both in vacuum and in atmosphere. The influence of a homogeneous block inside the heater was also studied. The results demonstrate that for a ring - shaped heater with a homogeneous block in vacuum, a good uniformity of the temperature can be obtained and in atmosphere the ring heater should be narrow and extend to the inner part for better uniformity. The results obtained by coupled thermal - electrical simulation using the finite element method （ANSYS） software results are in good agreement with the measured resuits. Furthermore, an optimized heater giving a uniform temperature all over the active area is suggested.

关 键 词：微电子机械系统 面型微加热器 热分析 

分 类 号：TN37[电子电信—物理电子学]