磁悬浮转子微陀螺的电容检测系统分析和实现  

Analysis and Implementation of Micromachined Gyroscope of Electromagnetic Levitating Rotor and Its Capacitance Signal Detection System

作　　者：刘武[1] 黄晓刚[1] 邵诗逸[1] 陈文元[1] 张卫平[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄模与微细加工教育部重点实验室微纳米加工国防实验室,上海200030

出　　处：《测控技术》2006年第1期1-4,共4页Measurement & Control Technology

基　　金：国家863计划项目(2002AA745120);国家自然科学基金(60402003)资助项目;上海市科委重大专项基金资助项目

摘　　要：介绍了一种新型磁悬浮转子微陀螺的电容检测方案,其特点是检测定子上径向分布的电容极板和悬浮转子形成差动电容的变化。检测电路为基于相关检测原理的交流电容电桥的方法。电路实现中采用积分电荷放大器作为前置级,对其输出和噪声进行了深入的分析。之后,前置级的输出信号经过低噪声放大器进行放大,再通过带通滤波以及相关解调等电路实现检测系统需要的输出幅值和信噪比。实验证明,实现的检测系统对角度输入有较好的线性响应,角度分辨率达到0.1,°即可检测到的电容变化约为1 fF。The capacitance signal detection circuit of a novel micromachined gyroscope of electromagnetic levitating rotor is presented. The differential capacitances that composed by stator and levitating rotor are used as the sensor of the input angle. The detection circuit uses alternating current capacitance bridge method and the principle is based on the correlated demodulation. In the system, the charge integral amplifier is used as the preamplifier whose output and noise has been studied in details. Then the low noise amplifier amplifies the signal. Band pass filter and correlated demodulator and other circuits are also used to improve the signal noise ratio and reach wanted amplitude. The test proves that the detection system has a good linear response to the angle input and reaches the 0. 1 degree resolution that corresponds to 1 fF.

关 键 词：电容检测 相关解调 磁悬浮 微陀螺 微电子机械系统 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TP212.1[自动化与计算机技术—检测技术与自动化装置]