纳米级定位精度一维位移工作台  

A One-dimensional Nano-positioning Stage

作　　者：戴蓉[1] 谢铁邦[1] 常素萍[1] 

机构地区：[1]华中科技大学

出　　处：《中国机械工程》2006年第2期115-118,共4页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(50175037)

摘　　要：介绍了一种具有纳米级定位精度的一维位移工作台。工作台采用粗精两级定位机构。可以实现0～6mm范围、1nm理论分辨力的快速、高精度定位；固定在工作台上的全息衍射光栅实现了对工作台位移的高精度闭环检测。采用ANSYS有限元分析软件对精定位工作台进行了静态及动态特性分析；采用双频激光干涉测长仪对工作台的定位精度进行了对比测量。位移工作台已用于表面三雏形貌测量中，给出了对标准样板的测试结果。A one dimension nano-positioning stage was described. The stage was designed to be as a set of two grades, they were coarse and fine, microfeed mechanism and was able to realize 0-6mm large range of motion, 1nm positioning resolution. A reflecting hologram diffraction grating was fixed to the stage to form a closed loop displacement measuring system. The finite element method was used to analyze static and modal features of the stage. The positioning precision of the stage was measured by a laser interferometer. The stage has been used to construct a three dimensional surface profilometer and the experimental results are presented.

关 键 词：柔性铰链 PZT驱动 微位移工作台 有限元分析 3D形貌测量 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置]