扭梁悬臂梁支撑的扭摆式MEMS永磁双稳态机构  

A Teeterboard Pattern MEMS Permanent Magnet Bistable Structure Supported by Torsion and Cantilever Beam

作　　者：姜政[1] 丁桂甫[1] 王艳[1] 张东梅[1] 王志明[1] 冯建智[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,上海200030

出　　处：《Journal of Semiconductors》2006年第1期143-149,共7页半导体学报（英文版）

基　　金：教育部科学技术研究资助项目(批准号:0307)~~

摘　　要：在进行理论分析证实可行性和模拟仿真优化参数后,利用非硅表面微加工方法中的牺牲层工艺制备了一种扭梁悬臂梁支撑的扭摆式MEMS永磁双稳态机构.该双稳态结构尺寸为1.9mm×1.6mm×0.03mm,通过永磁力实现稳态姿态无功耗保持,通过对其单侧触点施加纵向驱动力使之达到30μm的纵向驱动位移,可以实现机构的双稳态姿态切换,可以通过控制永磁体磁片、悬臂梁和扭梁的尺寸来灵活调控稳态切换所需的驱动力矩.此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器.After feasibility analysis and parameter optimization, a teeterboard pattern MEMS permanent magnet bistable structure supported by a torsion and cantilever beam is fabricated with sacrificial layer technology of non-silicon surface micro fabrication, The size of the bistable structure is 1.9mm × 1.6mm ×0.03mm. The stable states can be maintained without power consumption by a permanent magnet force,and the two states are switched by applying a perpendicular driving force on one side of the anchors to achieve a perpendicular displacement of 30μm. The driving moment can be adjusted by controlling the sizes of the permanent magnet, torsion, and the cantilever beam, With electromagnetic, electrothermal, and electrostatic micro actuators,this bistable structure can be applied to permanent magnet bistable MEMS relay.

关 键 词：永磁 双稳态 MEMS 微继电器 

分 类 号：TM58[电气工程—电器]