新型微机械变形反射镜研究  

Research on Novel MEMS Deformable Mirrors

作　　者：闫金良 赵银女[1] 于芬[1] 

机构地区：[1]烟台师范学院物理系,烟台264025

出　　处：《仪器仪表学报》2006年第1期91-93,共3页Chinese Journal of Scientific Instrument

摘　　要：提出一种新型的静电驱动微机械变形反射镜,研究了静电力驱动的静态模型和动态模型。结果表明,驱动器的变形位移随驱动电压的增加出现稳定的非线性增加和不稳定的“拉入”现象;当变形镜由余弦电压驱动时,平衡位移的响应为2倍频的余弦信号;变形镜驱动电压撤除后驱动器上电极薄板经过17μs回复到驱动前的未变形状态。所得结果对于设计微机械变形镜具有重要意义。A novel electrostatically controlled MEMS deformable mirrors is described. The static characteristic and dynamic characteristic of deformable mirrors actuated eleetrostatically are studied. The results show tbat the actuator undergoes the deflection increasing nonlinearly at voltages below pull-in voltage and snap through instability at voltages above pullqn voltage when subjected to a voltage ramp. When the deformable mirror is drived by the cosinoidal signal, the response equilibrium displacement is frequency doubling cosinoidal. The time required for a deflected actuator to return to its undeflected state is about 17μs when the actuated voltage is set to zero. The results are very useful for the fabrication of MEMS deformable mirrors.

关 键 词：变形镜 微电子机械系统 静电力驱动 

分 类 号：TH703.8[机械工程—仪器科学与技术]