铁电液晶空间光调制器氢化非晶硅薄膜p－i－n光敏层的研究  

HYDROGENATED AMORPHOUS SILICON THIN FILM p i n PHOTOSENSOR FOR FERROELECTRIC LIQUID CRYSTAL OPTICALLY ADDRESSED SPATIAL LIGHT MODULATORS

作　　者：朱振才[1,2] 秦伟芳[1,2] 陈杰 王汝笠[1,2] 严义埙 

机构地区：[1]中国科学院上海技术物理研究所 [2]青年光电工程研究中心

出　　处：《红外与毫米波学报》1996年第1期18-22,共5页Journal of Infrared and Millimeter Waves

基　　金：上海市科技发展基金博士后科研资助计划资助

摘　　要：描述了氢化非晶硅／铁电液晶空间光调制器的结构和工作原理，并从器件的电学模型出发，着重讨论了整体器件对光敏层的特性要求。The general structure and operation of the hydrogenated amorphous silicon/ ferroelectric liquid crystal spatial light modulators(FLCSLMs) were described in detail.The electrical requirements of photosensors for FLCSLMs were discussed and derived from the a Si :H/FLC SLM electrical model and equivalent circuits.Fabrication and photoelectric characteristics of the a Si:H thin film p i n photosensors were investigated.

关 键 词：光敏层 氢化非晶硅 薄膜 铁电液晶 空间光调制器 

分 类 号：TN304.12[电子电信—物理电子学] O471[理学—半导体物理]