微悬臂梁法向弹性系数的标定方法与分析  

Normal Spring Constant Calibration Methods and Analysis of Microcantilever

作　　者：鲍海飞[1] 李昕欣[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《测试技术学报》2006年第1期21-26,共6页Journal of Test and Measurement Technology

基　　金：国家863计划资助项目(2004AA404045);国家自然科学基金资助项目(60376038)

摘　　要：微机械加工制造的微悬臂梁/探针在科学研究和工业生产中有着重要的应用,作为原子力显微镜中的关键核心组件,微悬臂/探针结构在许多领域如表面特性研究和微加工等领域扮演着重要的角色.目前,尤其在生物、化学、和危险物品的检测上已经成为一个重要的平台.除了尺度测量外,当人们对表面力和原子间的相互作用力需要更准确和绝对的数值时,需要对微悬臂的弹性系数进行准确的标定,弹性系数的测量精度影响测量力学量的最终结果.本文对目前发展起来的几种标定方法,如参考悬臂梁的标定方法、悬臂梁的共振法和悬臂梁的热噪声振动法,从原理上和试验上进行总结和分析,对相应测试方法和影响测试精度的相关因素进行评述.Micro-cantilever prepared in microelectromechanical system （MEMS） has important applications in modern scientific research and industrial fabrication. The tiny cantilever being a critical core in atomic force microscope （AFM） plays an important role in many fields, such as the study of surface properties and the application in micro/nano machining. At present, it becomes an important platform in chemical, biological and explosive material detection. Beyond the dimensional measurement performed by the AFM, the information about the absolute interaction forces between micro objects or molecules emerges as a critical part in research field. In order to obtain the mechanical properties in quantity, the spring constant of micro-cantilever should be calibrated before its use. The measurement accuracy of the spring constant affects the final true measurement result. In this paper, the developed calibration methods, such as the reference cantilever method, the oscillation method and the thermal noise measurement method are presented and reviewed in theory and experiment, in which the advantages and disadvantages related to the measurement methods and relevant factors affecting the measurement precision are given and discussed.

关 键 词：微悬臂梁/探针 标定 原子力显微镜 微机电系统 

分 类 号：TH742[机械工程—光学工程]