(110)硅基光纤定位槽的研究  

(110) Silicon-based Fiber Coupling Grooves

作　　者：贾翠萍[1] 董玮[1] 徐宝琨[1] 周敬然[1] 王丹[1] 陈维友[1] 

机构地区：[1]吉林大学电子科学与工程学院集成光电子国家重点实验室,吉林长春130012

出　　处：《半导体光电》2006年第1期34-36,共3页Semiconductor Optoelectronics

基　　金：国家"863"计划资助项目(2002AA312023)

摘　　要：利用(110)硅片在KOH溶液中各向异性腐蚀制作出两个互相垂直的光纤定位槽。由于在该方位腐蚀出的不标准的V型槽,难以对此精确设计来固定光纤。设计了利用KOH溶液定向腐蚀制作出的平行四边形蚀坑串,所形成的锯齿状沟槽结构来固定光纤。依据硅的各向异性腐蚀特性对平行四边形蚀坑尺寸进行了分析设计。由于腐蚀过程中锐角凸角和钝角凸角产生的削角面不一致,致使锯齿状沟槽精确固定光纤产生偏差,设计采用菱形凸角补偿结构进行完善,从而达到精确固定光纤的目的。Two mutually vertical fibers coupling grooves are fabricated by using anisotropic etching of the （110） silicon in the KOH solution. It is difficult to design accurately to fix the fibers because non-standard Ⅴ-grooves are formed. The dentate groove is devised which is composed of a series of the etched parallelogram pits in KOH solution. The size of the parallelogram is analyzed and designed according to anisotropic etching properties of silicon. There are some warps for the dentate groove fixing fibers because the different convexes have the disaccord of the undercuts. So the dentate groove is perfected by the rhombus compensation pattern. As a result,precisely fixing the fibers can be achieved.

关 键 词：KOH (110)硅片 锯齿状沟槽 凸角 

分 类 号：TN305[电子电信—物理电子学]