脉冲时间对AFM阳极诱导氧化加工的影响  

Effect of Pulse Duration on Fabrication Results of AFM Tip Induced Oxidation

作　　者：李敏[1] 刘庆纲[1] 匡登峰[2] 郭维廉[3] 张世林[3] 张珊 胡小唐[1] 

机构地区：[1]天津大学精密测试计量技术及仪器国家重点实验室,天津300072 [2]南开大学信息技术科学学院光学研究所,天津300071 [3]天津大学电子信息工程学院,天津300072 [4]深圳市科发实业有限公司,深圳518128

出　　处：《纳米技术与精密工程》2006年第1期79-82,共4页Nanotechnology and Precision Engineering

基　　金：教育部天津大学南开大学科技合作项目;天津市自然科学基金资助项目(013602111).

摘　　要：通过改变AFM阳极诱导氧化加工点结构时的偏压和脉冲时间,发现氧化点高度和宽度与所施加偏压呈对数关系,并且发现氧化点高度与宽度与脉冲时间呈指数关系．同时,在环境温度和氧气浓度保持不变的条件下通过改变加工中的相对大气湿度,研究了大气湿度对所加工氧化点结构的高度和宽度的影响,即氧化点的高度和宽度都随着相对湿度的增加而增加。通过实验,发现扫描速率为1μm／s、所施加偏压为7 V、脉冲时间为1 s、相对湿度为40％左右时所加工结构较为理想．Changing the applied voltage and pulse duration applied to the AFM tip and sample during the fabrication of nano-oxidation dots, it is found that the dependence of the height and width of nano-oxidation are logarithmic correlated with the applied voltage while exponentially correlated with the pulse duration. At the same time, the effect of humidity on the height and width of nano-oxidation dots is systematically studied at various relative humidities by keeping the oxygen concentration and temperature constant, it is found that the height and width of nano-oxidation dots increase with the increase of the relative humidity. It is shown from the experiments that the ideal fabrication condition is： scan speed at 1 μm/s, applied voltage at 7 V, pulse duration at 1 s and relative humidity at 40%.

关 键 词：AFM阳极氧化 脉冲时间 偏压 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]