磁驱动MEMS光开关的设计、分析和仿真  

Design, analysis and simulation of magnetically-actuatedoptical switches based on MEMS technology

作　　者：余洪斌[1] 陈海清[1] 刘彦[1] 李俊[1] 

机构地区：[1]华中科技大学光电子科学与工程学院,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2006年第4期18-20,共3页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：总装备部十五预研资助项目.

摘　　要：对比静电驱动与磁驱动,发现只有当驱动器的间距小于1.75μm时,静电能密度才处于优势地位,而大于此间距后,磁驱动将表现出主导地位.在此基础上,为了设计出具有较大运动范围的光开关,提出了一种新的基于MEMS技术的磁驱动形式,采用溅射、激光镀覆等方法在衬底上制备磁性薄膜,并通过外加磁场实现开关动作.对采用永磁材料和软磁材料这两种情况下光开关的静态行为进行了分析和模拟.结果显示,尽管使用不同类型的磁性材料会对开关的响应产生影响,但其最大转角都可达到80°,远远超过静电驱动光开关所能实现的程度,同时它还避免了静电驱动中常见的结构“塌陷”现象.The intention of this work is to design an optical switch with wide movement range. According to MEMS technology, a magnetically-actuated device, a device actuated by external magnetic field, is developed, in which the magnetic film is deposited onto the device structure by some methods such as sputtering, laser ablation etc. The static behaviors of the optical switches made by both hard and soft magnetic materials are analyzed and simulated. The results showed that the angular deflection of them reached as high as 80~, which significantly exceeded that of the electro-statically actuated one, despite of what type of magnetic materials, and that the phenomenon called ＂pull in＂ associated with electrostatic actuation was also prevented.

关 键 词：光开关 静电驱动 磁驱动 永磁材料 软磁材料 

分 类 号：TN256[电子电信—物理电子学]