高精度压电步进直线驱动器  

Ultra-precision piezoelectric stepping linear actuator

作　　者：赵宏伟[1] 吴博达[1] 程光明[1] 刘国嵩[1] 刘建芳[1] 杨志刚[1] 

机构地区：[1]吉林大学机械科学与工程学院,长春130022

出　　处：《吉林大学学报（工学版）》2006年第3期350-354,共5页Journal of Jilin University:Engineering and Technology Edition

基　　金：'863'国家高技术研究发展计划项目(2002AA423150);国家自然科学基金资助项目(50475010)

摘　　要：提出一种以压电叠堆为驱动动力源的新型精密直线驱动器方案。定子采用柔性铰链双侧对钳方式交替对动子起到钳位作用。对驱动器工作原理进行了分析研究,建立了机械系统的数学模型。采用MSC Patran/Nastran软件对机械结构进行了仿真分析,并对所开发的驱动器样机进行了实验测试。测试结果与理论分析结果基本相符,样机的运动速度可达1.52mm/m in、单步最小位移(运动分辨率)为3.35 nm。驱动器性能稳定可靠,可望在精密工程等相关领域得到应用。A new type of precise linear actuator using the piezoelectric stack as actuating element was presented. The stator clamps the rotor by a flexure hinge clamping structures in symmetrical directions. The working principle of the actuator was analyzed, and a mathematic model of the mechanical system was set up. The mechanical structure was simulated by the MSC Patran/Nastran software. The experimental test of the actuator prototype was performed and the test results were in agreement with the theoretical analysis results basically. The actuator prototype can move with speed 1.52 mm/min, and the minimum step size （ moving resolution） is 3.35 nm. The actuator works stably and reliably, may be used in the domain of precision engineering.

关 键 词：机械工程 直线驱动 压电叠堆 有限元仿真 柔性铰链 

分 类 号：TN384[电子电信—物理电子学] TH703.6[机械工程—仪器科学与技术]