氮化铁梯度薄膜的制备和磁性研究  

PREPARATION AND MAGNETIC PROPERTIES OF IRON NITRIDES GRADIENT FILM

作　　者：林川[1] 姜恩永[1] 孙多春[2] 田民波[2] 

机构地区：[1]天津大学应用物理学系,天津300072 [2]清华大学材料科学与工程系,北京100084

出　　处：《真空科学与技术》1996年第1期1-4,共4页Vacuum Science and Technology

基　　金：1993~1995年国家自然科学基金

摘　　要：用对向靶溅射方法制备出氮化铁梯度薄膜。利用X射线光电子能谱（XPS）对样品进行了深度剖面分析：铁原子和氮原子的百分含量沿膜厚方向呈梯度变化。X射线衍射表明膜中含有α－Fe，α”－Fe16N2，ε－FexN（2＜x≤3）和ξ-FeN各相。随着氮分压增加，膜中含氮量高的相比例亦增加，饱和磁通密度逐渐降低。The iron nitrides gradient films were prepared by facing target supttering(FTS). X-ray photoelectron spectroscopy (XPS) was employed for profile analysis and the results showed that Fe and N concen tration changed gradually through the whole thickness of the films- lt was confirmed by X-ray diffraction(XRD) patterns that there were a-Fe, a'-Fe,,N,, E-Fe.N (2<x<3) and -Fe2N in the films. With the increa sing of N2 partial pressure,the percentage of phases with high nitrogen content increased,and the saturationmagnetic flux density of the film decreased.

关 键 词：对向靶溅射 氮化铁 薄膜 梯度薄膜 

分 类 号：O484.1[理学—固体物理]