α-Si_3N_4晶须中缺陷与晶须生长气氛关系的研究  被引量:3

RELATIONSHIP BETWEEN THE DEFECTS OF ALPHA-SILICON NITRIDE WHISKERS AND GROWTH ATMOSPHERE

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作  者:吴华武[1] 徐功骅[1] 尉京志[1] 来月英[1] 张克宏[1] 

机构地区:[1]清华大学化学系

出  处:《复合材料学报》1996年第2期60-64,共5页Acta Materiae Compositae Sinica

基  金:国家自然科学基金

摘  要:本文研究了用无定形氮化硅超细粉原位生长α-Si3N4晶须,晶须生长温度为1400~1450℃,恒温1~4h。讨论了在晶须生长过程中,不同的保护气氛对晶须质量的影响。当晶须在高纯N2气氛中生长时,得到的晶须中氮含量为32%~34%,氧含量为8%~6%,氯含量为0.1%左右。这类晶须中存在着大量的缺陷。当晶须在NH3气氛中生长时,得到的晶须中氮含量为39%左右,氧含量为1%,氯含量为0.01%,在这类晶须的透射电镜照片中几乎看不到缺陷。Alpha-silicon nitride whiskers were prepared by the 'in-situ' growth of ultrafine amorphous silicon nitride powders.The experiment was carried out at 1400~1450℃ for 1~4 hours.When the experiment was conducted in the atmosphere of nitrogen with high purity,the nitrogen content,oxygen content and chlorine content in alpha-silicon nitride whiskers obtained were 32%~34%,8%~6% and~0.1%,respectively.A lot of defects were detected in the whisker.However,when the experiment was completed in an atmosphere of ammonia,the content of nitrogen,oxygen and chlorine in the whiskers changed to 39%,1% and 0.01%,respectively,where nearly' defect-free 'in the whisker was detected.

关 键 词:晶须 氮化硅 生长气氛 晶体缺陷 

分 类 号:O781[理学—晶体学]

 

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