微机电系统动态特性的光学检测方法  

Optical Measuring Methods for Dynamic MEMS Characterization

作　　者：陈津平[1] 郭彤[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室

出　　处：《电子测量与仪器学报》2006年第2期30-34,共5页Journal of Electronic Measurement and Instrumentation

基　　金：国家"863"计划资助项目(编号:2004AA404042);博士后科学基金资助项目。

摘　　要：微机电系统(MEMS)的动态表征是为可动MEMS器件的设计和加工过程提供可靠的实验数据反馈。文中构建了一个MEMS动态测试系统,它采用了光学检测方法,具有非接触、快速、高精度等优点。系统分别采用光流技术和显微干涉技术,结合频闪照明的方法,对MEMS器件的面内和离面运动特性进行了测量。通过对一个微加工水平谐振器的运动特性测量实验说明了系统具有的功能。A purpose for dynamic MEMS characterization is to provide relible experimental data feedback to the process of design and fabrication of movable MEMS devices. A dynamic measuring system was built up using some optical methods, which are non-contact, fast, and high precision. This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices. The capabilities of the system are illustrated with a study of the dynamic behavior of a micro-machined lateral resonator.

关 键 词：微机电系统 光学检测 动态特性 光流技术 显微干涉 频闪照明 

分 类 号：TH74[机械工程—光学工程] TN216[机械工程—仪器科学与技术]