MEMS微继电器及其关键问题研究现状  

An Review of MEMS-based Microrelay Evolution and Its Key Issues

作　　者：尤政[1] 李慧娟[1] 张高飞 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《压电与声光》2006年第3期278-281,共4页Piezoelectrics & Acoustooptics

基　　金：国防预研基金资助项目

摘　　要：通讯等应用领域微型化的需求和微机械加工技术的进步推动了基于微机电系统(MEMS)技术的微继电器的快速发展。介绍了国外MEMS微继电器的研究现状,分析了不同类型MEMS微继电器的特点,讨论了MEMS微继电器的基本结构特征和关键问题,并分析了MEMS微继电器的发展趋势和面临的挑战。The rapid development of MEMS-based microrelay is mostly contributed to the urgent demanding in application such as communication, which is extensively improved by microelectronic technology and microfabrication. Characteristics of variable microrelay are particularly demonstrated through presenting the development of microrelay. Besides, microrelay＇s fundamental structures and electrical contact issues are analyzed,including their developing trend and challenge.

关 键 词：微机电系统 MEMS 微继电器 接触电极 

分 类 号：TM58[电气工程—电器]