基于非周期多层膜的X射线成像研究  

Imaging Research with Non-periodic Multilayers

作　　者：顾春时[1] 王占山[1] 穆宝忠[1] 王风丽[1] 张众[1] 秦树基[1] 陈玲燕[1] 

机构地区：[1]同济大学精密光学工程技术研究所物理系,上海200092

出　　处：《光子学报》2006年第6期881-885,共5页Acta Photonica Sinica

基　　金：国家863-804-3项目(2004AA843081);上海市博士后研究基金(05R214140)资助项目

摘　　要：本文设计了惯性约束聚变(ICF)诊断实验用X射线Kirkpatrick-Baez(KB)显微镜,给出了系统的结构参量·使用ZEMAX光学软件对KB型显微镜进行了性能模拟,结果表明:在8keV能点,放大率为8倍时,轴上点的最佳空间分辨率小于2μm,200微米视场的空间分辨率优于10μm·采用磁控溅射方法制备了W/B4C非周期多层膜,经X射线衍射仪(XRD,工作能量8keV)测量,其反射率为20%,带宽为0.3°,达到了KB型显微镜成像系统的要求·使用Cu靶X射线管进行了成像实验,得到了放大倍数分别为1倍和2倍的一维X射线像·A grazing KB microscope was designed for hard X-ray （8 keV; Cu Ka radiation） imaging in ICF diagnostic experiments. Ray tracing software （ZEMAX） is used to simulate optical system performance. The best theoretical resolution of KB microscope is about 2 micron and better than 10 micron in 200 micron field of view. W/B4C supermirror was deposited on the Si wafer substrate and the reflectivity was measured by X-ray diffraction instrument （XRD）. The reflectivity of supermirror is about 20% in 0. 3° bandwidth. 8keV Cu target X-ray tube source was used in x-ray imaging experiments and the magnification of 1 × and 2 × X-ray images are obtained.

关 键 词：KB型显微镜 X射线非周期多层膜 X射线成像 空间分辨率 

分 类 号：O434.1[机械工程—光学工程]