计算机光学元件的发展及现状  

Developing Trend and Actuality of Computer Optical Element

作　　者：杜诗研[1] 李慎[1] 

机构地区：[1]电子科技大学物理电子学院,四川成都610054

出　　处：《兵工自动化》2006年第6期81-81,共1页Ordnance Industry Automation

摘　　要：计算机光学元件基于光波衍射理论,通过在片基上刻蚀产生两个或多个台阶深度的浮雕结构,形成纯相位并同轴再现,使其具有极高的衍射效率。其分析方法包括几何理论法、标量衍射理论法和矢量理论法。其制作根据元件表面的相位分布函数,反推出相位分布,再按照相位分布等级N,制作n个二元振幅型掩模版,最后进行光刻和离子束刻蚀。Computer optical element based on light-wave diffraction theory is through that etches on film base to produce relievo structure with two or multiple sidestep depths, and form pure phase and coaxial recurrence, so it has higher diffraction efficiency. Analyzing method includes geometry theory, scalar diffraction theory and vector diffraction theory etc methods. Machining procedures： reduced phase distributing according to phase distributing functions of element surface, N piece of duality swing mask plate were machined according to the level of phase distributing. Finally, photo etching and ion beam etching was put up.

关 键 词：光学元件 计算机 离子束刻蚀 相位分布 理论法 衍射理论 衍射效率 标量衍射 分布函数 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术] TH74[自动化与计算机技术—计算机科学与技术]