硅微机械动平板表面粘附阻力  

Surface Adhesive Resistance of Moving Plate in MEMS

作　　者：沈雪瑾[1] 侯利程[1] 刘谨[1] 

机构地区：[1]上海大学机械自动化系,上海200072

出　　处：《润滑与密封》2006年第7期64-67,共4页Lubrication Engineering

基　　金：国家自然科学基金重点资助项目(50135040)

摘　　要：以MEMS动平板模型为研究对象,建立了微间隙动平板表面粘附阻力的理论模型,利用界面化学中表面能和粘附功的概念,推导出了光滑平板和开孔平板的表面粘附阻力公式,并探讨了影响表面粘附阻力的诸多因素。在此基础上还设计了拉簧-平板-弯簧器件以进行相应的表面粘附阻力实验研究。理论分析和实验验证均表明,表面粘附阻力随单位面积的液气界面表面能以及平板宽度的增大而增大,随着接触角的减小而增大,且平板工艺开孔的总宽度增大以及平板移动方向的孔数的增多将显著增大表面粘附阻力。The moving plate in MEMS was taken as the research object, and the theoretical model of surface adhesive resistance about micro-gap moving plate was established. The formulas of surface adhesive resistance about the smooth plate and the plate with holes were deduced based on surface chemistry, and some factors that could affect the surface adhesive resistance were discussed. On the basis of theoretical analysis, several experiment members were designed with the aim of the experiment research for the surface adhesive resistance. By theoretical analysis and experimentation, the results show that the surface adhesive resistance increases along with the increase of the surface energy and the width of plate, and with the decrease of the contact angle. The surface adhesive resistance of the plate with holes increases along with the increase of the total width of hole and the number of hole in the direction of motion.

关 键 词：微机械 微间隙平板 表面力 表面粘附阻力 

分 类 号：TH123[机械工程—机械设计及理论] O441[理学—电磁学]